RTA
Drawer type RTA- R-401 2”4”single Wafer
- Chamber size: 150X150 ㎜
- Max. Temp: 1 Zone, 1000℃
- Uniformity:Ø100 ㎜ ±3℃
- Wafer Size : Small ~4" inch
- Exterior Dimensions: 500 x 500 x H1060 mm
- Heating rates:1℃~100℃/ S UP
- Model Type Heater System: Cooling chamber model
- Insulation:Using both air and water cooling
- Thermocouple:k- type
- Controller:Single program with 16 segments, or 30 program and 300 segments,
- Power:220V / 100A / 1Ø 、25000W
R-8160 2" x 16pc or 8" single Wafer
- Chamber size: 250X250 ㎜
- Uniformity:Ø200 ㎜ ±3℃
- Wafer Size : 2"x16pc or 8"x1pc Wafer
- Max. Temp:1000℃
- Heating rates:1℃~100℃/ S UP
- Model Type Heater System: Cooling chamber model
- Insulation:Using both air and water cooling
- Thermocouple:k- type
- Controller:Single program with 16 segments, or 30 program and 300 segments,
- Power:220V / 100A / 1Ø 、25000W
Tube RTA
- Lamp
- Temp:RT~1,200℃
- Heating rates:50℃/s in Vacuum
- Uniformity: ±2℃ at 1200℃ in Vacuum
- Gas:Air、Vacuum、Active Gas
- Chamber:20mm x 20mm x 2.0tmm
- Thermocouple:JIS Thermocouple, K Type
- Lamp:1kW-4-100V
- Program:Temperature and Time Setting、256 Stmp、32 Program、PID+fuzzy Control、auto fine tuning、USB Connect、Manual/Auto Control.
- Exterior Dimensions: 260W x 169H x 355D