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Professionally-qualified for High Technology

RTA

Drawer type RTA-   R-401 2”4”single Wafer

  • Chamber size: 150X150 ㎜
  • Max. Temp: 1 Zone, 1000℃
  • Uniformity:Ø100 ㎜ ±3℃
  • Wafer Size : Small ~4" inch
  • Exterior Dimensions: 500 x 500 x H1060 mm
  • Heating rates:1℃~100℃/ S UP
  • Model Type Heater System: Cooling chamber model
  • Insulation:Using both air and water cooling
  • Thermocouple:k- type
  • Controller:Single program with 16 segments, or 30 program and 300 segments,
  • Power:220V / 100A / 1Ø 、25000W
  • Drawer type RTA-

    R-401 2”4” single Wafer

  • Quartz Plates
  • Up to 1000℃

    Heat-up Rate 1℃~100℃/s

R-8160  2" x 16pc or  8" single Wafer

  • Chamber size: 250X250 ㎜
  • Uniformity:Ø200 ㎜ ±3℃
  • Wafer Size : 2"x16pc or 8"x1pc Wafer
  • Max. Temp:1000℃
  • Heating rates:1℃~100℃/ S UP
  • Model Type Heater System: Cooling chamber model
  • Insulation:Using both air and water cooling
  • Thermocouple:k- type
  • Controller:Single program with 16 segments, or 30 program and 300 segments,
  • Power:220V / 100A / 1Ø 、25000W
  • Wafer : 2"~8"(2"x16pc,4"x4pc,8"x1pc)

  • SIC disk for 2”~8” wafer
  • T/C Wafer Correction
  • Heat-up/ Cool-down

    Heat-up/ Cool-down

Tube RTA

  • Lamp
  • Temp:RT~1,200℃
  • Heating rates:50℃/s in Vacuum
  • Uniformity: ±2℃ at 1200℃ in Vacuum
  • Gas:Air、Vacuum、Active Gas
  • Chamber:20mm x 20mm x 2.0tmm
  • Thermocouple:JIS Thermocouple, K Type
  • Lamp:1kW-4-100V
  • Program:Temperature and Time Setting、256 Stmp、32 Program、PID+fuzzy Control、auto fine tuning、USB Connect、Manual/Auto Control.
  • Exterior Dimensions: 260W x 169H x 355D
  • Up to 1000℃

    Heat-up Rate 50℃~100℃/s

  • Sliding Door
  • Tube RTA

    For 4” wafer

  • vacuum system/Digital gauge
  • 6” Tube RTA with high reflection Golden Chamber